MicroMaterials 1997

Contacts

Review of
MicroMaterials '97

Procceedings of
MicroMaterials '97

10. Technological and Environmental Aspects

• Fabrication of Micro Parts by High Aspect Ratio Structuring and
  Metal Injection Molding With Supercritical Debinding Method
  (Keynote Lecture)
  Shimizu, T.*; Murakoshi, Y.*; Sano, T.*; Maeda, R.*; Sugiyama, S.**
  * Mechanical Engineering Laboratory, AIST/MITI, Ibaraki, Japan
  ** Ritsumeikan University, Japan
  
  
• Optimisation of the LIGA-droplet Technology for Microlenses
  Moldovan, N.*; Göttert, J.**; Mohr, J.**; Nedelcu, S.*;
  Oßmann, Ch.**; Ilie, M.*
  * Institute of Microtechnology, Bucharest, Romania
  ** Forschungszentrum Karlsruhe GmbH, Institut für
  Mikrostrukturtechnik, Germany
  
  
• Micro-Structuring by Laser Beam Removal
  Hellrung, D.; Gillner, A.; Poprawe, R.
  Fraunhofer-Institut für Lasertechnik, Aachen, Germany
  
  
• Manufacturing of Thin Movable Micro-Mirrors in Silicon
  by Using an Optimized CMP-Process
  Wollmann, U.; Steiniger, C.; Kehr, K.; Kaufmann, C.; Gessner, T.
  Technische Universität Chemnitz-Zwickau, Zentrum für Mikrotechnologien, Germany
  
  
• Laser Machining of Ceramics for MCM-D Applications
  Glaw, V.*; Hahn, R.*; Wolf, J.*; Töpper, M.**; Buschick, K.*;
  Hein, U.*; Ginolas, A.**; Ehrmann, O.*; Reichl, H.*
  * Fraunhofer Institute IZM Berlin, Germany
  ** Technical University Berlin, Microperipheric Technology Center,
  Germany
  
  
• Electron Microscopic Investigation of Structural Changes
  in Single Crystalline Silicon Induced by Short Pulse Laser Drilling
  Kaspar, J.; Luft, A.
  Fraunhofer-Institut für Werkstoff- und Strahltechnik, Dresden, Germany
  
  
• A New Approach to Halogen Free FR-4 Base Materials
  (Keynote Lecture)
  Flury, P.; Magendie, F.; Scharf, W.; Weidmann, U.
  Ciba Speciality Chemicals, Inc., Basel, Switzerland
  
  
• Chemical Analysis of Electronic Materials
  Danzer, B.; Brodersen, K.; van Eldik, R.
  Universität Erlangen/Nürnberg, Germany
  
  
• Environmental Impact of Materials in Electronics
  Nissen, N.F.; Griese, H.; Middendorf, A.; Müller, J.; Pötter, H.
  Fraunhofer Institute IZM Berlin, Germany
  
  
• Recycling Aspects of Micro Materials
  Müller, J.; Griese, H.
  Fraunhofer Institute IZM Berlin, Germany