MicroMaterials 1997

Contacts

Review of
MicroMaterials '97

Procceedings of
MicroMaterials '97

12. Piezoelectric Materials

• Materials Development of Piezoelectric Thin Films for Actuator
  Devices - Comparative Study of PZT and Wurtzite Type Materials
  Grown by Magnetron Sputtering (Keynote Lecture)
  Gugenberger, F.; Fergen, I.; Quandt, E.; Holleck, H.
  Forschungszentrum Karlsruhe, Institut für Materialforschung I, Germany
  
  
• PZT-Thick Films for Microsystems - Recent Trends and Issues
  Schönecker, A.; Gesemann, H.-J.; Seffner, L.; Schlenkrich, F.;
  Uhlig, I.; Otschik, P.
  Fraunhofer-Institut für Keramische Technologien und Sinterwerkstoffe, Dresden, Germany
  
  
• Thick PZT Film Deposition and Patterning by Jet Molding for
  Realization of Micro Actuator System
  Akedo, J.; Ichiki, M.; Kikuchi, K.; Maeda, R.
  Mechanical Engineering Laboratory, AIST/MITI, Ibaraki, Japan
  
  
• Sol-Gel Derived Ferroelectric Thin Films for Piezoelectric
  Microsensors and Microactuators
  Maeda, R.*; Lee, C.**; Itoh, T.***; Schroth, A.*; Suga, T.***
  * Mechanical Eng. Lab., AIST, MITI, Ibaraki, Japan
  ** Microsystems Lab., ITRI, Chuntung, Taiwan, Republic of China
  *** RCAST, The University of Tokyo, Japan
  
  
• Measurement of High Field Impedance on Electroceramic Materials
  Liu, J.-G.* / **; Schönecker, A.*; Keitel, U.*
  * Fraunhofer-Institut für Keramische Technologien und
  Sinterwerkstoffe, Dresden, Germany
  ** Technische Universität Dresden, Institut für Grundlagen
  der Elektrotechnik/Elektronik, Germany
  
  
• Application of Sol-Gel Deposited Piezoelectric PZT-Layer -
  Design of a 2D-Scanning Actuator Device
  Schroth, A.* / ** / ***; Tanaka, M.**; Lee, C.****; Maeda, R.***; Matsumoto, S.***
  * NEDO, Ibaraki, Japan
  ** Micromachine Center, Ibaraki, Japan
  *** Mechanical Engineering Laboratory, AIST/MITI, Ibaraki, Japan
  **** Industrial Technology Research Institute, Microsystem Laboratory, Taiwan
  
  
• Fracture Criterion for a Conducting Crack in Piezoelectric Ceramics
  Heyer, V.*; Schneider, G.*; Weitzing, H.*; Balke, H.**; Drescher, J.**;
  Bahr, H.-A.** ; Kemmer, G.**
  * Technical University Hamburg-Harburg, Germany
  ** Dresden University of Technology, Germany
  
  
• Simultaneous Displacement Actuation and Detection, and
  Piezoelectric Excitation for SFM Cantilever and Its Array Using
  Piezoelectric PZT Thin Layer
  Lee, C.* / ***; Itoh, T.*; Maeda, R.**; Suga, T.*
  * RCAST, The University of Tokyo, Japan
  ** Mechanical Engineering Lab., AIST, MITI, Ibaraki, Japan
  *** Microsystems Lab., ITRI, Taiwan, Republic of China
  
  
• Micromechanical Ultrasonic Sensor Array With Piezopolymer
  as Active Sensor Material
  Thieme, L.; Neundorf, T.; Manthey, W.
  Technische Universität Chemnitz-Zwickau, Fakultät für Elektrotechnik und Informationstechnik, Germany