MicroMaterials 1997

Contacts

Review of
MicroMaterials '97

Procceedings of
MicroMaterials '97

15. Polymeric Materials

• Low Dielectric Constant Materials for Interlayer Dielectric
  Applications: Materials Science Issues (invited)
  Mc Kerrow, A.J.*; Shih, Wei-Yan*; Leu, Jihperng**; Ho, P.S.***
  * Texas Instruments Inc., Dallas, USA
  ** Sematech, Austin, USA
  *** University of Texas at Austin, USA
  
  
• Positive Photopatternable Dielectrics for Microelectronic Applications
  Sezi, R.*; Schmid, G.*; Radlik, W.**; Krabe, D.***; Buschick, K.***
  * Siemens AG, Erlangen, Germany
  ** Siemens AG, München, Germany
  *** Technical University Berlin, Microperipheric Technology Center, Germany
  
  
• BCB - A Polymer for Thinfilm Applications
  Töpper, M.*; Ehrmann, O.*; Reichl, H.* / **; Glaw, V.**; Wolf, J.**;
  Fischbeck, G.***; Petermann, K.***
  * Technical University Berlin, Microperipheric Technology Center, Germany
  ** Fraunhofer Institute IZM Berlin, Germany
  *** Technische Universität Berlin, Institut für Hochfrequenztechnik, Germany
  
  
• Reduction of Stress in Micromachined Components Caused
  by Humidity-Induced Volume Expansion of Polymer Layers
  Buchhold, R.*; Nakladal, A.*; Sager, K.*; Gerlach, G.*; Sahre, K.**;
  Müller, M.**; Eichhorn, K.-J.**
  * Dresden University of Technology, Institute of Solid-State Electronics, Germany
  ** Institute of Polymer Research, Dresden, Germany
  
  
• Evaluation of ORMOCERs for Microelectronics Applications
  Dabek, A.*; Popall, M.**; Olsowski, B.**; Reichl, H.*
  * Technical University Berlin, Microperipheric Technology Center, Germany
  ** Fraunhofer Institut für Silikatforschung, Würzburg, Germany
  
  
• Polymer Materials for Microsystem Technologies (Keynote Lecture)
  Ruprecht, R.; Hanemann, T.; Piotter, V.; Hausselt, J.
  Forschungszentrum Karlsruhe, Institut für Materialforschung III, Germany
  
  
• Specially Designed UV-Adhesives for Fiber-Chip-Coupling
  Battermann, A.*; Labs, J.**
  * Panacol-Elosol Oberursel, Germany
  ** Fraunhofer Institute IZM Berlin, Germany
  
  
• Influence of Material Properties on the Performance of Polymer Micropumps
  Ahrens, R.; Bacher, W.; Martin, J.; Rummler, Z.; Schomburg, W.K.
  Forschungszentrum Karlsruhe, Institut für Mikrostrukturtechnik, Germany
  
  
• Polycyanurates - Innovative Thermosets
  Bauer, M.; Bauer, J.; Uhlig, C.
  Fraunhofer-Institut für Angewandte Materialforschung, Außenstelle Polymerverbunde Teltow, Germany
  
  
• Load Free Determination of the Coefficient of Thermal Expansion on Polymer Foils
  Feustel, F.*; Vogel, D.**; Wiese, S.*
  * Technische Universität Dresden, Institut für Halbleiter- und Mikrosystemtechnik, Germany
  ** Fraunhofer Institute IZM Berlin, Germany