MicroMaterials 1997

Contacts

Review of
MicroMaterials '97

Procceedings of
MicroMaterials '97

19. Sensors and Actuators

• Function Adapted Materials for the Construction of Microactuators (Keynote Lecture)
  Lehr, H.; Abel, S.; Ehrfeld, W.; Löwe, H.; Nopper, M.
  Institut für Mikrotechnik Mainz GmbH, Germany
  
  
• Device- and System-Level Models for Micropump Simulation
  Schrag, G.*; Voigt, P.*; Sieber, E.-R.*; Wiest, U.**; Hoppe, R.H.W.**; Wachutka, G.*
  * Technical University München, Chair for Physics of Electrotechnology,Germany
  ** University Augsburg, Chair of Applied Mathematics I, Germany
  
  
• Novel Low-Field Giant Magnetostrictive Multilayers
  Ludwig, A.; Quandt, E.; Seemann, K.
  Forschungszentrum Karlsruhe, Institut für Materialforschung, Germany
  
  
• Functional Polymers as Actuators for Microsystem Technologies
  Roth, H.-K.; Bleyer, A.; Schrödner, M.
  Thüringisches Institut für Textil- und Kunststoff-Forschung Rudolstadt, Germany
  
  
• Investigation of Piezoceramic Materials for Producing Ferroelectric Tactile Arrays
  Todorova, V.*; Christov, S.*; Phillipov, P.**
  * Technical University of Gabrovo, Higher Institute of Mechanical and Electronical Engineering, Bulgaria
  ** Technical University of Sofia, Bulgaria
  
  
• IR Sensors for FLIR, Seeker and Countermeasure Applications (Keynote Lecture)
  Gubala, M.; Kwok, P.; Teague, J. R.
  Boeing North American Inc., Duluth, GA, USA
  
  
• Accelerated Aging of Micromachined Silicon/Siliconcarbide
  Diaphragms by the Application of Pressure and Temperature
  Eickhoff, M.; Reinhardt, P.; Krötz, G.
  Daimler-Benz AG München, Forschung und Technik, Germany
  
  
• Solid-State-pH-Sensor by Thick Film Technology
  Otschik, P.*; Vonau, W.**; Krabbes, I.*; Kretschmar, C.*
  * Fraunhofer-Institut für Keramische Technologien und Sinterwerkstoffe, Dresden, Germany
  ** Kurt-Schwabe-Institut für Meß- und Sensortechnik e.V., Meinsberg, Germany
  
  
• A Hydrogen Sensor Based on Au Activated WO3 Thin Films
  Chemically Vapor Deposited on Silicon Substrates
  Davazoglou, D.*; Georgouleas, K.*; Tsamakis, D.**
  * NCSR "Demokritos", Institute of Microelectronics, Attiki, Greece
  ** National Technical University of Athens, Dept. of Electrical Engineering, Greece
  
  
• Transfer Function of Electrodiffusion Sensors in Local Similitary Group
  Bouabdallah, A.; Zizi, M.
  Université des Sciences et de la Technologie Houari Boumediene, Institut de Physique, Bab-Ezzour, Algeria
  
  
• Microstructure and Doping Analysis of the Polysilicon Layers After
  P Diffusion From a POCl3 Source for Capacitive Sensor Applications
  Gaiseanu, F.*; Tsoukalas, D.**; Stoemenos, J.***; Dimitriadis, C.A.***; Tsoi, E.**
  * Research Institute for Electronic Components Bucharest, Romania
  ** Institute of Microelectronics, NCSR Demokritos, Attiki, Greece
  *** Aristotle University of Thessaloniki, Department of Physics, Greece