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Fraunhofer Institute IZM Berlin
Department: Mechanical Reliability and Micromaterials

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MicroMaterials Research

Fraunhofer Institute IZM Research:

Introduction
Stress Evaluation
Fracture Electronics
Materials Mechanics
MicroDAC
Microfabrication
Experimental Techn.
Special Service
Technical Equipment
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Microfabrication Techniques

BMBF Project Introduction:

Microfabrication Techniques

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In the framework of a scientific project a new production process for microsystems in small and medium-sized enterprises was developed and examined. The process - called µFab - is based on the principle of division of labour. New concepts were developed to allow the low to medium-range industrial production of microsystem components, while simultaneously maintaining the highest possible product flexibility. 11 institutes cooperated in this project which was supported by the Federal German Ministry of Education, Science, Research and Technology (BMBF). The production process based on the division of labour was tested using a microsystem, an optical level. The results of the project were collected in a handbook. The following figures offer a short introduction to this handbook. To order the handbook, please contact us.

Microsystem Optical Level, Sketch

Microsystem "Optical Level", Sketch


Microsystem Optical Level, Produced by Means of µFab-Concept

Microsystem "Optical Level"


Modular µFab Station

Modular µFab Station


Concept for the Industrial Production of Hybrid Microsystems in Small and Medium-Sized Enterprises

Concept for the Industrial Production of Hybrid Microsystems in Small and Medium-Sized Enterprises


Contact: Dr.-Ing. V. Großer

Tel.: +49 - (0)30 - 464 03 -250
Fax: +49 - (0)30 - 464 03 -211
e-mail: grosser@izm.fhg.de

Fraunhofer IZM
Gustav-Meyer-Allee 25
D-13355 Berlin
Germany


last update Oktober 30, 2003
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