| MicroMaterials Research Fraunhofer Institute IZM Research:
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Microfabrication
Techniques |
BMBF Project Introduction:
Microfabrication Techniques

In the framework of a scientific project a new
production process for microsystems in small and medium-sized enterprises was developed
and examined. The process - called µFab - is based on the principle of division of
labour. New concepts were developed to allow the low to medium-range industrial production
of microsystem components, while simultaneously maintaining the highest possible product
flexibility. 11 institutes cooperated in this project which was supported by the Federal
German Ministry of Education, Science, Research and Technology (BMBF). The production
process based on the division of labour was tested using a microsystem, an optical level.
The results of the project were collected in a handbook. The following figures offer a
short introduction to this handbook. To order the handbook, please contact us.

Microsystem
"Optical Level", Sketch

Microsystem
"Optical Level"

Modular µFab Station

Concept for the
Industrial Production of Hybrid Microsystems in Small and Medium-Sized Enterprises
| Contact: |
Dr.-Ing. V. Großer Tel.: +49 - (0)30 - 464 03 -250
Fax: +49 - (0)30 - 464 03 -211
e-mail: grosser@izm.fhg.de
Fraunhofer IZM
Gustav-Meyer-Allee 25
D-13355 Berlin
Germany |
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