| MicroMaterials Research Fraunhofer Institute IZM Research:
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Experimental
Techniques |
- In-situ Deformation Measurement Methods
E.g. microDAC - deformation analysis by means of
correlation method
- Thermo-Mechanical Problems of Solder Joint
Reliability
Reliability assessment of solder joints and micro solder
interconnects
- Development of Special Simulation Tools for
Applications in Microtechnologies
- In-situ Experiments by Means of Laser Methods
Combined with Image Processing
Laser scanning experiments combined with FEM
Speckle photography and speckle interferometry
On-line measurements on MEMS and microelectronics packages
3D-topography
Material mechanics for additive technologies
- Residual Stress Evaluation
X-ray stress and texture analysis
Stresses in thin films and layers
- Thermal Deformation and Temperature Field
Measurement
- Defectoscopy (e.g. by acoustic microscopy, laser
measurement techniques etc.)
- Microfabrication Strategies, especially for SME
Modular microsystems, modular design principles for MEMS
and 3D-packages
In-situ measurement techniques for packaging microfabrication modules
X-Ray Diffraction Equipment
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